Microfabricated systems that interface with biological structures at multiple scales. These include new microfluidics technologies, bioMEMS, novel detection microtechnologies and methods, cell and tissue level microinstruments and microsystems.
Solid-state micro sensor and device technology: modeling, development, fabrication of micro sensors using VLSI technology, development of CAD tools for use in micro sensor development. Integrated electromechanical actuators, micro valves and micro positioning systems. Microfluidic systems: DNA assays, micro reactors, electrophoresis stages, fluorescence detectors. Process technology and modeling: sacrificial etching, deposition sealing, shadowing effects, physical kinetics of LPCVD processes in confined volumes, conformality, modeling of wet etch processes in confined volumes, wetting, adhesion and surface tension effects.